Microstructure for increased sensitivity to infrared (U)

摘要

A design of a microstructure for high sensitivity to IR having a bolometer microstructure for infrared on two levels, the lower level having a surface of a reflective metal film, for example Pt, Au or Al, to reflect the infrared radiation which penetrates to that level, the upper level being separated from the lower level by means of an air gap of approximately 1-2 microns which enables the reflected infrared energy to interfere with the incident infrared energy and increase sensitivity to a higher level. IMAGE