THIN-FILM, FLAT PANEL, PIXELATED DETECTOR ARRAY FOR REAL-TIME DIGITAL IMAGING AND DOSIMETRY OF IONIZING RADIATION

摘要

A thin-film, flat panel, pixelated detector array serving as a real- time digital imager and dosimeter for diagnostic or megavoltage X rays or gamma rays, including a plurality of photodiodes made of hydrogenated amorphous silicon arrayed in columns and rows upon a glass substrate. Each photodiode is connected to a thin film field effect transistor also located upon the glass or quartz substrate. Upper and lower metal contacts are located below and above the photodiodes to provide the photodiodes with a reverse bias. The capacitance of each photodiode when multiplied by the resistance of the field effect transistor to which it is connectedPPThis invention was made with Government support under Grant R01 CA51397 award by the National Institute of Health. The Government has certain rights in the invention.