Stable and compact two beam interferometer system based on Michelson interferometer

摘要

A beam divider (2) is provided for producing a test beam (10) and reference beam (11), is integrated in the objective (3), between the two objective parts (3a,3b). The two objective parts are so formed and arranged, that the test beam is imaged on the object surface (6) to be tested and the reference beam on the reference mirror (5). The reference mirror is arranged in the illumination beam course, between the detector side objective part and the light source (1) at the place of the image of the light source. A beam dividing deflection mirror (4) is arranged between the light source and the objective.