Method for compensation of wave front deformations caused by optical system

摘要

In the radiation path of the optical system (5) at least two optical compensation components (1, 2) are fitted which are selected from a series of pre-prepared optical component parts provided with different adjustment fault types and strengths dependent upon the findings by the wave front measurement instrument, and are aligned to one another and to the optical system. The series of pre-prepared optical compensation components is represented by plain plates with machined-in cylindrical and/or spherical fitment faults of different strengths. The alignment of the compensation components occurs directly according to angle sizes, calculated from the extent of the wave front deformation.