Raster objective and raster beam converter as well as optical scanning device with at least one of these elements

摘要

A grating objective is described which comprises at least three gratings and in which the axial ray and a border ray of a radiation beam are interchanged at least three times so that the objective has a wavelength-independent behaviour, a relatively large image field and a satisfactorily uniform intensity distribution. A beam shaper and a grating objective with a built-in beam shaper based on the same principle are also described.