Cylindrical microwave aerial for generating plasma in resonance conditions

摘要

The microwave aerial includes a tubular section (20) and magnets (22-1,22-2 etc) arranged within the tubular section along the axis of the cylinder. These generate a magentic field within the region of the aerial. Each end of each magnet is adjacent to a further magnetic with like poles facing each other. The magnets may be electromagnets, the wires of which may be superconducting. The tubular structure may also include a set of pipes for the circulation of a heat transfer fluid. Using a cathodic pulverisation technique, a series of micropoints is formed over the major surface of the cylinder.