PROCESS FOR RECYCLING INDIUM OXIDE OXIDE CATALYTIC OXIDE CATALYTIC PULVERIZING TARGETS

摘要

The invention relates to a method for recycling spent indium oxide-tin oxide (ITO) cathode sputtering targets and densified ITO material residues formed during the target manufacturing process, which is characterized in that the ITO material is milled to a powder having grain sizes of less than 500 mum and the powder thus obtained is formed into new target blanks, alone or in admixture with a non-used ITO powder, under the simultaneous action of pressure and temperature. / P