CRYOGENIC TRAP, CRYOGENIC ARRANGEMENT, VACUUM PUMP AND METHOD FOR CRYOGENIC TRAPPING

摘要

The invention relates to a cryogenic trap. It relates to a cryogenic trap (12) intended to be placed between a vacuum pump (16) and a chamber subjected to pumping, and which comprises an arrangement ( 20) cryogenically cooled to trap vapors from the pumped chamber to the vacuum pump, and a passive shield member (30) positioned between the cryogically cooled arrangement and the vacuum pump, the shielding member being isolated from the ambient atmosphere so that the temperature of the protective body oscillates between that of the cryogenically cooled arrangement and that of the vacuum pump. BR/ Application to pumping installations for high vacuum. / P