Volatile organic lanthanide compounds and methods for the preparation of lanthanide-containing layered materials from these compounds

摘要

An adduct of a lanthanide (e.g. yttrium) * small Greek beta *-diketonate and a donor ligand, the adduct being suitable for use in a metal-containing material deposition process, wherein the ligand has Lewis base characteristics that match the Lewis acid characteristics of the lanthanide * small Greek beta *-diketonate in the absence of the ligand is described.