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Interferometer for observing the interference pattern of a surface under test utilizing an adjustable aperture stop
Interferometer for observing the interference pattern of a surface under test utilizing an adjustable aperture stop
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机译:干涉仪,用于通过可调孔径光阑观察被测表面的干涉图样
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摘要
An interferometer is used for observing the shape of a surface to be detected with the desired spatial resolution. A variable aperture stop is arranged at a Fourier transform image plane of the surface to be detected within an imaging optical system for forming an interference pattern of a reference light and a measuring light. The aperture diameter of the variable aperture stop is adjusted by a control in accordance with the desired spatial resolution.
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