Temperature sensor element, temperature sensor having the same, and manufacturing method of temperature sensor element

摘要

A temperature sensor element for measuring exhaust temperature of an automotive engine, a plate shaped metal support, a first electrically insulating film present on the support, a thermal sensitive film having a pair of electrodes, on the thermal insulating film, which is present on the electrical insulating film A temperature sensor element comprising a second electrically insulating film present. The temperature sensor element is excellent in heat resistance and excellent heat resistance because of its low heat capacity.