PROBLEM TO BE SOLVED: To make the superprecise grinding and superprecise polishing of a cut material practicable by electrodepositing abrasive grains on the upper face of the stator ring of an ultrasonic motor having piezoelectric ceramics ring stuck to its lower face, and making the abrasive grain vibrate elliptically. ;SOLUTION: Abrasive grains are electrodeposited on the upper face of a stator ring 2 where the ring 1 of piezoelectric ceramics having formed two groups of electrodes is stuck to its lower face for forming an ultrasonic elliptic vibration electrodeposited grinding wheel. When a progressive wave is generated in this state, each point on the surface of the stator ring 2 having electrodeposited abrasive grains 3 makes elliptic motion. The superprecise grinding or superprecise polishing of a specified article can be carried out by the abrasive grain 3 moving elliptically. In addition, since the abrasive grain 3 makes elliptic vibration, chips produced by machining can be easily exhausted during grinding the specified article.;COPYRIGHT: (C)1997,JPO
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