SUBSTRATE FOR INK-JET RECORDING HEAD, INK-JET RECORDING HEAD, INK-JET RECORDING DEVICE AND INFORMATION PROCESSING SYSTEM

摘要

PURPOSE: To make ink discharge efficiency good and to enable high-speed recording operation by providing an exothermic part consisting of lamination of an exothermic resistance layer in a tapered notch part provided in a wiring electrode which connects an electrothermal transducer to a functional element for driving. ;CONSTITUTION: A substrate 100 for a recording head is formed by forming both the NPN transistor 120 of an element for driving and the exothermic resistance layer 103 of an exothermic part 110 on a P-type silicon substrate 1 through an epitaxial region 4, a regenerative layer 101, an interlaminar film 102 and a wiring electrode 104. Further, the exothermic part 110 is constituted by cutting the wiring electrode 104 and respectively forming connecting faces. The step coverage properties of the exothermic resistance layer 103 for the wiring electrode 104 and a first protective film 105 are made good by keeping a rectilinear taper on both sides of the tapered notch part edge part 104a of the wiring electrode 104. The thickness of the protective film 105 is thinned. Therefore, heat transfer efficiency is increased and large effect is obtained in low power consumption, speeding up and high integration. Long life, a low cost and high reliability are enabled.;COPYRIGHT: (C)1997,JPO