COATING THICKNESS MEASURING METHOD AND COATING THICKNESS MEASURING DEVICE FOR COATING ON BOARD

摘要

PROBLEM TO BE SOLVED: To measure a coating thickness of a coating on a wide area board together with precise position information. ;SOLUTION: Processing such as dividing of a command signal to a synchronous motor (open-controllable stepping motor) serving as a driving source, which moves a base board to be measured or a measuring device, is carried out at need, and synchronously with the command signal, position information (measurement positions 1, 2, 3,...) based on a drive of the synchronous motor and coating thickness information (measurement values za₁, za₂, za₃,...) are extracted at the same time. From a head information in the measurement information, a displacement pattern is extracted, and on the basis of the characteristic of the displacement pattern, an absolute position is computed, and then, the absolute value is added to the measurement information, and consequently, the absolute position information for the measurement position is obtained.;COPYRIGHT: (C)1997,JPO