SELF-ADVANCING SCANNING PROBE MICROSCOPE AND COMPOSITE EQUIPMENT INCLUDING IT

摘要

PROBLEM TO BE SOLVED: To measure an arbitrary part of a large sample using a single equipment by providing a scanning probe microscope with self-advancing function, i.e., a self- advancing moving mechanism employing a piezoelectric element. ;SOLUTION: The scanning probe microscope comprises a body section (SPM device section A), and a mechanism section performing self-advancing operation (self- advancing mechanism section B). The self-advancing mechanism section B comprises a tubular piezoelectric element 12, and a tubular rigid body part 13 mounted on a plate 11. A reference potential is applied to a common electrode on the inner surface of piezoelectric element 12 and a voltage is applied to any one of a plurality of electrodes on the outer surface to cause variation for shifting the piezoelectric element 12. The SPM device section A comprises a cantilever 23 provided with a probe 22 at the forward end thereof, a displacement detecting mechanism comprising a photodetector 25, and an inch worm unit 27. The inch worm unit 27 moves axially in the inner space of rigid body part 13 according to inch worm operation system by operating piezoelectric elements 28-30 appropriately. According to the structure, arbitrary part of a large sample can be measured using a single equipment while avoiding increase in scale and price.;COPYRIGHT: (C)1997,JPO