EMISSION OF HIGHLY REACTIVE ACTIVE SPECIES AND MODIFICATION OF SOLID SURFACE

摘要

PROBLEM TO BE SOLVED: To improve structural characteristics and functions of a surface of a solid by irradiating ultraviolet laser beam having a specified wave length on a surface of a specific solid layer formed on a substrate and emitting highly reactive active species in high purity and in high efficiency. ;SOLUTION: On a solid layer, formed on a substrate, consisting of a mixture of a matrix material such as a rare gas, nitrogen gas, carbon dioxide, a fluorinated alkane compound, an alkane compound, an ether or an alcohol and a photo reactive material such as an azide compound, an azo compound, a carbonyl compound, an acid anhydride, a hydrazine or an organic halide compound, ultraviolet laser beam such as argon-fluorine excimer laser beam having a wave length of ≤400nm is irradiated to emit highly reactive active species. Further, the emitted highly reactive active species are preferably made to contact a surface of a solid to modify the surface.;COPYRIGHT: (C)1997,JPO