DEVICE FOR JUDGING GOOD/NO GOOD OF SAMPLE FACE TO BE ANALYZED

摘要

PURPOSE: To make it possible to detect the directional uneven surface of a fine waveform in a wide range stead of a visual observation by using a bundle optical fiber probe having a plurality of light emitting and receiving optical fibers disposed at the ends at random on one flat surface. ;CONSTITUTION: Each 1/4t part of an analyzing sample 1 after cutting or polishing becomes discharging position 2 of a light emitting analyzer which are distinguished into a normal surface 3, and an abnormal surface where a pinhole 4, a crack 5 and a polished irregularity 6 are generated. Then, light emitting optical fiber and receiving optical fibers are disposed at random in an effective discriminating range core, and the normal surface is distinguished from the normal surface by utilizing the change of a received light intensity signal by using a bundle optical fiber probe detector.;COPYRIGHT: (C)1997,JPO