Air operation type block valve for semiconductor equipment

摘要

(57) Abstract Objective As for this device, in decreasing joint substantiallyThe gas reservoir which prevents the generation of ri escaping gas, is generated in the couplingLosing, changes the gas, piping is easy instantaneouslySo installation to semiconductor equipment compound e for easy semiconductor equipmentIt designates that abarubu is offered as purpose. Constitution At the time of this devising, it is formed with versatile block,It is the gas supply which discharges the gas to semiconductor side into the valve bodyDistribution facilities to do the aisle, in the said valve body introduction and the exhaust air of the gas columnThe u air valve in V letter condition distribution facilities the air Drive section of the deck which is done,Multiple tupple distribution facilities to do alongside the aforementioned gas supply aisle, in aforementioned V letter conditionAs for one side of the air valve which distribution facilities is done, you joint to the aforementioned gas supply aisleTo do, in the aforementioned air valve gas induction or the gas the semiconductorWithout sending on side, to joint the flueing section which the exhaust air is done, aforementioned air runningChoice by the air pressure from the dynamic section machine direction of the gas andType is controlled.