PLATINUM RESISTOR TERMOMETER, PROTECTIVE COATING LAYER AND ITS MANUFACTURE

摘要

PROBLEM TO BE SOLVED: To provide a platinum resistor thermometer whose electric characteristics are not deteriorated at a high temperature, and its manufacturing method. ;SOLUTION: A thin film platinum resistor temperature detecting element 14 is coated with a high quality dielectric layer 24 which is covered with a partition layer 26. This partition layer 26 covers the upper part of the dielectric layer 24, and prevents contaminant from diffusion toward the detecting element 14. The partition layer 26 allows diffusion of oxygen, so that the platinum layer is surrounded by an abundant oxygen atmosphere. The high quality dielectric layer 24 is, e.g. a silicon dioxide layer, and the partition layer 26 is composed of titanium dioxide. By this constitution, the temperature detecting element 14 is not contaminated and the temperature coefficient of the resistor is not deteriorated at a high temperature.;COPYRIGHT: (C)1997,JPO