COATING APPARATUS AND COATING METHOD AND MANUFACTURING APPARATUS AND MANUFACTURE OF COLOR FILTER

摘要

PROBLEM TO BE SOLVED: To provide a coating apparatus and a coating method in which a glass substrate with a coating film formed can be taken out of a stage easily without causing damages, and also to provide a manufacturing apparatus and a manufacturing method for color filters by employing the apparatus and the method. ;SOLUTION: This coating apparatus using a coating method for manufacturing color filters is provided with a large number of suction holes 66 distributed in the upper face of a stage 6, a chamber 68 formed in the inside of the stage 6 communicating with the suction holes 66, a negative pressure source 74 and a positive pressure source 80 to selectively supply negative pressure and positive pressure to the chamber 68, and a plurality of lift pins 84 capable of being projected out of the upper face of the stage 6, and the lift pins 84 are arranged while being divided into a right side and a left side and respective lift pins in the right side and the left side can be projected independently.;COPYRIGHT: (C)1997,JPO