SEAL OF ATMOSPHERE OF GLOW DISCHARGE ANALYSIS INSTRUMENT

摘要

PROBLEM TO BE SOLVED: To prevent entering of an atmospheric gas that disturbs the spectrum analysis of glow discharge by a method wherein an inert gas is applied to a portion around a sample by a pressure higher than in an ambiance thereof. ;SOLUTION: A sample is held on a right position in an electric contact surface of a member 112 by virtue of a pressure of an atmospheric gas. A roughly 30 watt and 13.56MHz of RF energy source is applied to a surface 130 contacting the conductive member 112 and the sample. Glow discharge is generated in a region between a face of the sample and a face of an anode sleeve. The analysis is executed by means of a proper spectroscope in which a light is downwardly focused by passing through a hole of the anode sleeve in the glow discharge region. In order to prevent the atmospheric gas from passing through the sample contacting the surface 130 and an O-ring 110, the inert gas is pumped into passages 122, 120 through a pipe 126. As a result, the inert gas passes from a channel 118 to the outside in the emission direction around the sample by a pressure higher than in an ambiance thereof.;COPYRIGHT: (C)1996,JPO