DIAMOND CLAD DEVICE AND METHOD FOR FUSION REACTOR FIRST WALL

摘要

PURPOSE: To enable directly cladding diamond thin film with large area, few impurity and good crystallinity. CONSTITUTION: Provided are a reaction vessel 16 of which one end is opened and at the other end, seal plate 20 is placed to produce ECR(electron cyclotron resonance) plasma 23 in the front of the first wall, a gas introduction inlet 17 projected from the open end of the reaction vessel 16 to supply the reaction vessel with reaction gas 18, a magnetic field generation means 22 arranged around the reaction vessel 16 and a waveguide 19 fixed to the other end of the reaction vessel 16 to introduce microwave 21.