SYSTEM, APPARATUS FNA METHOD FOR PROVIDING INTEGRATED MONITORING AND CONTROLLING FUNCTION FOR SEMICONDUCTOR SPRAY PROCESSIG TOOL

摘要

PROBLEM TO BE SOLVED: To provide a method and a device for giving integrated monitoring, control and a diagnostic function to a semiconductor spray processor. SOLUTION: The spray processor host system contains a supervisor computer 102 connected to one of a plurality of spray treatment tools, and the supervisor computer 102 imparts continuous information interchange with a processor, and maintains current state information. The system further comprises an engineer computer 106 for giving an interface driven by a command to the spray processor host system to an operator. Each engineer computer 106 can monitor a plurality of the supervisor computers, and attains recipe directory edit, recipe down-loading event log searching, data-capture file data graph processing and a processor-state viewing function.