Micro-polarimeter and micro polarimeter system

摘要

PURPOSE: To obtain a measuring tool and a measurement concept which can be used for on-line process control by comprising a system with a unit of analyzers in N sector configuration and a detector, and allowing the analyzers to allocate different polarization values to the sectors. ;CONSTITUTION: A projecting surface of a corn 1 is convered with a polarizer coating 2. The diameter of the polished corn is approximately 1mm in its typical value so that light flux can be caught entirely. The dimension of an opening angle is set so that the polarization characteristics of the coating 2 become effective due to light entering the axis of the corn in parallel, and different polarization values can be allocated to a detector 3 forming a nit, provided at the corn 1. Then, light to be inspected approaches the corn in parallel with the corn axis. A different amount of light passes on to N photosensitive sectors of the detector 3 from the corn 1 according to the spatial position and direction of a polarization ellipse. In this case, the number of sectors should be at least six to determine an ellipse parameter.;COPYRIGHT: (C)1996,JPO