Are applied to the mass spectrometry die escaping gas detector gas concentration calibration method and the proofreading instrument

摘要

PURPOSE: To furnish a gas concentration calibration method and a calibration implement for a gas leak detector which are highly sensitive and highly precise and also excellent in reliability, operability and maintainability, as a gas leak inspection method substituted for a gas inspection method using a freon gas. ;CONSTITUTION: A gas concentration calibration method applied to a gas- spectrometer-type gas leak detector having a gas sampling part 12, a vacuum exhaust part and a mass spectrometer part, wherein gas concentration calibration is executed by making a standard gas circulate through a closed pipeline composed of a gas collecting implement 8, a gas introduction selector valve 6, a gas sampling pump 7 and a minute leak mechanism part 1 for the mass spectrometer part by a gas introduction selecting mechanism. A gas concentration calibration implement applied to the mass-spectrometer-type gas leak detector, which is equipped with a gas circulating mechanism composed of the gas introduction selecting mechanism, the gas collecting implement of a fixed capacity, the gas sampling pump 7 and the minute leak mechanism part 1 for the mass spectrometer part 5.;COPYRIGHT: (C)1994,JPO&Japio