Laser plasma x-ray generator and x-ray morphism exit opening and closing feature

摘要

PURPOSE:To allow the continuous use of an X-ray generator for a long time by arranging a target material transfer device in a chamber, feeding a target material to the transfer device from the outside of the chamber, and continuously feeding the new target material to a laser light collecting point. CONSTITUTION:A target material 15 made of a liquid or solid inert element is fed to a target material transfer device 14 in a chamber 10 by a target material feeding device 20, and the target material is continuously fed to the light collecting point 18 of the pulse laser light 13a by the transfer device 14. The pulse laser light emitted from a laser light source 13 is sent to the light collecting point via a light collecting mechanism, the target material 15 heated by the pulse laser light is converted into plasma, and X-rays are emitted from the target material 15. The emitted X-rays are ejected to the outside of the chamber 10 through the opening when an X-ray ejection port opening/closing mechanism 21 is opened. The stable and continuous radiation of X-rays is thereby allowed without replacing a target rotor with a high frequency.