Due to electronic beam excitation the x-ray spectroscopic analysis manner

摘要

PURPOSE:To allow the correction of fluorescent excitation by calculation by irradiating the atoms in a sample with primary characteristic X-rays (primary X-rays) by which the atoms are excited to radiate secondary characteristic X-rays (secondary X-rays). CONSTITUTION:The atoms in the sample are irradiated with the primary X-rays and are thereby excited to radiate the secondary X-rays. The effect of the primary X-ray at one point in the sample can be calculated and, therefore, the intensity of the secondary X-rays at the respective points in the sample can be calculated as well. The depth distribution from the sample surface of the secondary X-ray generating intensity can be determined when the radiation intensities of the secondary X-rays at the respective points in the sample are integrated with the layer surface of depth x2 from the sample surface. The intensity of the secondary X-rays is determined if these intensities are integrated by as much as the thickness of the sample. Further, the intensity of the primary X-rays is determined if the intensity distributions phi of the primary X-rays (x1, r1) are integrated form 0 to infinity with x1, r1. The correction of the fluorescent excitation is executed by calculating the intensity ratio of the primary and secondary X-rays.