Production manner of alloy powder for rare earth metal - succession metal target and production manner null of rare earth metal - succession metal

摘要

PURPOSE:To reduce the oxygen content in a target or the like in the manufacture of subjecting the mixture of rapidly solidified alloy powder and rare earth metal to pressure sintering under a nonoxidizing atmosphere in the specific temp. by specifying the oxygen content in the above alloy material. CONSTITUTION:The mixture of each alloy powder constituted of rare earth metal and transition metal in the compositional range where eutectic structure is revealed and subjected to rapid solidifying treatment and transition metal powder less than the objective compsn. of the target is prepd. The mixture is subjected to pressure sintering in a vacuum or under the atmosphere of an inert gas in the temp. range less than the liquid-phase revealing temp. of the mixture. In the manufacture of the rare earth metal-transition metal target, the oxygen content of the molten material in the alloy to be subjected to rapid solidifying treatment is regulated to =500ppm. By this method, the oxygen content in the target can regulatively be reduced, and, as the result, the magnetic anisotropy of a sputter film can be relieved.