PROCESS FOR MANUFACTURING AND CALIBRATING A RULER IN THE NANOMETRE RANGE FOR TECHNICAL APPARATUSES THAT ARE USED FOR HIGH-RESOLUTION OF ULTRA-HIGH RESOLUTION IMAGING OF STRUCTURES

摘要

1.1 A Process for Manufacturing and Calibrating a Ruler in the Nanometre Range for Technical Apparatuses that are Used for High-resolution or Ultra-high Resolution 2.1 The present invention describes the production and calibration of a ruler used to calibrate the above stated technical apparatuses. 2.2 At least two different crystalline or amorphous materials are used to construct the ruler; these should differ appropriately from each are in their contrast during imaging. These layers of material are deposited as a sequence of heterolayers on a carrier material, using a suitable material deposition process. The heterolayer sequence that is produced is described experimentally with at least one analytical method that is sensitive to the individual layer thicknesses of the heterolayer sequence. The data obtained by the analytical method are evaluated and recorded. By separating the heterolayer sequence in the direction of deposition, it is possible to render the layer structure visible. 2.3 The solution according to the present invention is suitable, in particular, for calibrating technical apparatuses that are used in raster electron microscopy, transmission electron microscopy, or raster probe microscopy (raster power microscopy, raster tunnel microscopy. 3.0 Figure 1.