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A method of making integrated optical waveguides, and an opt ical unit having integrated optical waveguides
A method of making integrated optical waveguides, and an opt ical unit having integrated optical waveguides
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机译:集成光波导的制造方法以及具有集成光波导的光学单元
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摘要
A structure of integrated optical components made on a plane surface on a substrate. A first glass layer (2; 27) having a plane surface is made, and then a channel (6, 7; 28) is formed in the plane surface of the first glass layer (2; 27). A second glass layer (9; 29) is deposited on the glass surface provided with a channel (6, 7; 28). The channel (6, 7; 28) in the surface of the first glass layer is formed or treated prior to the deposition of the second glass layer (9; 29) in such a way that at least the parts of the channel sides nearest the bottom of the channel converge toward the bottom of the channel. An optical unit having a waveguide structure on a substrate comprises two glass layers (2, 12) which surround at least one waveguide (13) made of glass having a core refractive index which is larger than the cladding refractive index of the glass layers (2, 12). The waveguide (13) has an approximately trapezoidal cross section with two opposed sides which converge toward each other in a direction toward the first deposited cladding layer (2) of the two cladding layers (2, 12).
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