Dry type sealing material, wet type sealing material, building member, manufacturing method thereof, clean room and local facility using the same

摘要

Do not allow gaseous organic matter to be present in the clean room or in the semiconductor manufacturing equipment.;A sealing material such as a gasket to be fitted to an air filter such as a ceiling or the like, a wet sealing material used to fill gaps in the connection of walls or partitions, a vinyl chloride sheet or a vinyl cloth Which does not generate gaseous organic substances at the time of use. Concretely, a carboxylic acid ester or the like having a molecular weight of 400 or more is used as a plasticizer, and a phenol compound having a molecular weight of 300 or more is used as an antioxidant. As the lubricant, one containing no aliphatic hydrocarbon having 19 or less carbon atoms (for example, microcrystalline wax) is used. As the antistatic agent, an alkylamine ethylene oxide adduct having a molecular weight of 350 or more is used.