Cooling chamber integrated high vacuum furnace structure and specimen moving device

摘要

The present invention connects a cooling chamber to a high vacuum tube furnace and moves the specimen from the furnace to the cooling position while maintaining high quality vacuum when rapid cooling is required after vacuum sintering and heat treatment. It relates to a structure and a specimen moving device of a cooling chamber-integrated high-vacuum furnace that can be made, the non-magnetic tube furnace 10 having a heating portion 11 and the cooling water installed on both sides of the heating portion 20) and the specimen moving table 30 inductively embedded in the nub furnace 10 and the specimen moving table 30 are attached to each other inside and outside the upper part of the tube furnace 10 by magnetic force. A pair of magnets 40 and 41, a cooling chamber 60 connected to the lower center of the tube furnace 10 to quench the specimen 50, and the air in the tube furnace 10 to draw out the vacuum Vacuum inlet 70 and gas inlet 80 for supplying gas into tube furnace 10. , The tube furnace is configured as a vacuum gauge 90 for measuring the gas pressure in the 10.