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Integrated circuit parallel inspection system and method using inspection equipment with single module structure
Integrated circuit parallel inspection system and method using inspection equipment with single module structure
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机译:使用具有单模块结构的检查设备的集成电路并行检查系统和方法
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摘要
In the logic device inspection equipment having a single module structure including several voltage / current sources, the inspection board is changed to a dual inspection board, and the measurement part of the processor can be changed to allow two logic devices to pass through, and a quad op amp Power supply by connecting voltage / current supply pins in parallel so that four single operational amplifiers and two dual operational amplifiers can be set during the hardware setup time of the power supply and test equipment for a single logic integrated circuit. Supply
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