Novellus installation with high back and throttle valves installed outside of installation

摘要

the design of the bag (HI - VAC) valve of equipment installed to the outside of the equipment, as in the back, the valve and the valve to the outside of the equipment installation is characteristic.;therefore, as above mentioned, this research according to the process of the equipment is simple, and the use of the valve in the valve position to the outside of the valve, the installation, cleaning and replacement work can easily effect.