Automated Data Processing Analysis of Semiconductor Manufacturing Equipment

摘要

The present invention relates to a method for automated data processing analysis of a semiconductor manufacturing facility that has automated the assumption of extracting, processing and analyzing data from a host computer database.;The method for automating data processing analysis of a semiconductor manufacturing apparatus according to the present invention is a method for automating data processing analysis of a semiconductor manufacturing equipment for storing process data of a process equipment for manufacturing a semiconductor device in a database. It is characterized in that it is configured to automatically perform the process and feedback to the process equipment to perform the analysis automatically.;According to the present invention, since the extraction, processing and analysis of the data is performed automatically, the feedback operation of the equipment is smooth and the database management is efficient.