Preventive maintenance schedule management system of semiconductor equipment

摘要

A preventive maintenance schedule management system of a new semiconductor facility is disclosed.;The present invention relates to a semiconductor integrated circuit device having a host part for automatically deriving input / output parameters of a semiconductor facility, a part for determining an input / output parameter of the facility and setting a preventive maintenance limit value for each parameter, Periodic preventive maintenance schedules that indicate when the plant's I / O parameters exceed the limit, indicating the time of the preventive maintenance of the affected plant.;Therefore, there is an effect that it is possible to predict the deterioration of equipment which is difficult to cover due to regular preventive maintenance activities, and an occasional preventive maintenance time to cope with sudden equipment problems.