A field emission electron gun capable of minimizing non-uniform effects of the ambient electrical potential state of an electron phase emitted from the emitter

摘要

An emitter 104 formed on a predetermined portion of the substrate, an insulating film 105 formed on the remaining portion of the substrate, and an emitter having a space between each emitter and the first gate electrode 101 And a second gate electrode formed on the insulating film so as to surround the outer circumferential surface of the first gate electrode having an interval between the outer circumferential surfaces of the first gate electrode and the second gate electrode, In the field emission electron gun including the second gate electrode 102 to which a second voltage smaller than the first voltage is applied, the emitter is formed on the substrate except for the central portion of the substrate. The first gate electrode has an inner circumferential surface which defines a hole 107 exposing a center portion of the insulating film located on the central portion of the substrate. The third gate electrode 106 may be formed on the center portion of the insulating film having a third voltage lower than the first voltage and having a different spacing between the first gate electrode and the inner circumferential surface of the third gate electrode.