A multi-stage gas separation method using semi-permeable membrane (MULTIPLE STAGE SEMI-PERMEABLE MEMBRANE GAS SEPARATION PROCESS)

摘要

The present invention relates to a method for separating a permeate gas to a desired high purity by using a multi-stage membrane process and a device used therefor. In the first step, a gas mixture to be treated is introduced into a membrane-containing first membrane separator having a relatively high intrinsic permeability To obtain a permeate gas and a residual gas as intermediate products, and in the second step, the permeate gas of the intermediate product is supplied to a membrane-containing second membrane separator having a relatively low intrinsic permeability to separate the permeate gas product having a very high purity And an apparatus are disclosed.