Scanning probe microscope - has probe holder, fixed to guide rail, moving macroscopically along rail with all microscope components, including test item but excluding probe holder and the probe, solidly linked together

摘要

The microscope has a body (1), one or more piezoelectric moving elements (2) and a probe (5) which is fixed to a probe holder (4) which moves macroscopically along a guide rail (3). All the microscope components including the test item (6), but excluding the probe holder and the probe, are solidly linked together. The guide rails and probe holder can be pressed together mechanically by springs or clamps or by a combination of magnet and magnetic materials. A further guide rail can be fitted between the first guide rail and the holder along which macroscopic movements can be made.