Thin-film multilayer sensor for quick measuring of gas temperatures and gas speeds also IR radiation

摘要

The sensor consists of a protection layer (1), a top metal layer (2), an insulation intermediate layer (3), between the top and the bottom metal layer (4). Also a lower insulation layer (5) and a carrier (6) or substrate. Electrical connections (7) are provided at the two metal layers (2, 4). The carrier material is electrically insulating and has a poor heat conductivity. The carrier material can be made of good heat conducting material. With electrically conducting carrier material, the lower metal layer (4) is insulated from the carrier using an additional insulating layer.