Apparatus for the treatment of by a winding mechanism moving web-shaped materials by means of a reactive or unreactive, by high frequency - or pulse generated low-pressure plasma discharge

摘要

The materials (6) are drawn through a device connected in a vacuum chamber (K) by means of a winding mechanism (8). The surface of the materials (6) is modified using a reactive or non-reactive low pressure plasma generated by h.f. or pulsed discharge. A low pressure plasma, which only burns locally in the area of the device (7), is generated using two hollow cathodes (1) connected to the two sides of the material (6). The cathode chambers (7) are designed such that their effective plasma passing openings (20) are closed on one side by the material (6) to be treated. ADVANTAGE - Has improved efficiency using simple system.