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acoustic multiple discrete phase fresnellinse and its application in acoustic tintendruckern

机译:声多离散相菲涅耳亚麻素及其在声学定律中的应用

摘要

Acoustic radiators which are focused diffractively by multi-discrete-phase binary Fresnel lenses are provided for applications, such as acoustic ink printing. Standard semiconductor integrated circuit techniques are available for fabricating such lenses in compliance with design specifications having relatively tight tolerances, including specifications for integrated lens arrays demanding substantial precision in the relative spatial positioning of several lenses. The diffractive performance of these lenses simulate concave refractive lenses, even though the lenses preferably have generally flat geometries. To that end, the lenses advantageously are defined by patterning acoustically flat surfaces, such as an acoustically flat face of a substrate or, better yet, an acoustically flat face of a layer of etchable material which is grown or otherwise deposited on an acoustically flat surface of an etch resistant substrate.
机译:提供了通过多离散二元菲涅耳透镜衍射聚焦的声辐射器,以用于诸如声墨印刷等应用。可使用标准半导体集成电路技术来制造这种透镜,以符合具有相对严格公差的设计规范,包括用于集成透镜阵列的规范,该规范要求在多个透镜的相对空间定位中具有相当大的精度。这些透镜的衍射性能模拟凹面折射透镜,即使该透镜优选地具有通常平坦的几何形状。为此,有利地,通过对声学平坦的表面进行图案化来限定透镜,例如对基板的声学平坦的表面进行图案化,或者更好的是,对可蚀刻材料层的声学平坦的表面进行图案化,该可蚀刻材料层在声学平坦的表面上生长或以其他方式沉积。耐腐蚀衬底的数量。

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