A corrosion-resistant protective coating (20) on an aluminum substrate (10) capable of withstanding corrosion attack by process halogen gases and plasmas is disclosed. The protective coating is formed by contacting an aluminum oxide layer on an aluminum surface (12) with one or more fluorine-containing gases at an elevated temperature. In a preferred embodiment, a high purity corrosion-resistant protective coating (20) on an aluminum substrate capable of withstanding corrosion attack is obtainable by first forming a high purity aluminum oxide layer on the aluminum substrate and then contacting the aluminum oxide layer with one or more high purity fluorine-containing gases at an elevated temperature to form the high purity corrosion resistant protective coating thereon.
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