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Diamond / carbon / carbon - composite material which can be used as an integral dielectric cooling plate, and method for its production
Diamond / carbon / carbon - composite material which can be used as an integral dielectric cooling plate, and method for its production
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机译:可用作整体介电冷却板的金刚石/碳/碳-复合材料及其制造方法
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摘要
A method for producing a diamond/carbon/carbon composite is provided which includes the steps of densifying a preform of interwoven vapor grown carbon fibers form a carbon/carbon composite, and then depositing a polycrystalline diamond film on the carbon/carbon composite. The preform may be densified by depositing pyrolyric carbon into the interstices of the preform, either by a chemical vapor infiltration process or by a pitch infiltration process. The polycrystalline diamond film is deposited on the carbon/carbon composite by a microwave plasma enhanced chemical vapor deposition process. The resulting diamond/carbon/carbon composite can be utilized as an integral dielectric heat sink by depositing metallic circuits on the diamond layer of the diamond/carbon/carbon composite.
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