METHOD AND DEVICE FOR PURIFYING GASEOUS EFFLUENTS CONTAINING SUBSTANCES HARMFUL BY COMBUSTION AND CHEMICAL PROCESSING USING A FLAME IN A COMBUSTION CHAMBER

摘要

P Device comprising a combustion chamber (1) and a spray washing device (16) for treating gaseous effluents containing various harmful substances, intended in particular for the manufacture of semiconductor circuits, supplemented by compression elements gaseous effluents, and regeneration of the washing or sorption fluid. BR/ By eliminating water vapor from the walls of the combustion chamber, high efficiency is achieved in the processing of harmful substances. Since the sorption fluid can not come into contact with the walls and parts of the combustion chamber, encrustations on important functional elements are avoided. The high temperature of the gaseous effluents ensures a low consumption of combustion gases and thus a good economy of the device. For the control of the device, gaseous flow measurements are used in different elements of the device. / P