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Homodyne interferometric receiver and calibration method having improved accuracy and functionality

机译:具有改进的精度和功能的同质干涉测量接收机和校准方法

摘要

A method and system for measuring the phase difference between two orthogonally polarized components of a test beam as well as the intensities of these two components. A partially-polarizing beamsplitter (101) divides a polarized test beam (103) into first and second spatially- separated beams (154,104). The first beam (154) passes through a wave plate (160) oriented so as to retard the phase of the s polarization component with respect to the p polarization component. The first beam (154) then passes through a first polarizing beamsplitter (155), to produce a first pair of spatially separated output beams (156,157) with mutually-orthogonal linear polarizations. The second beam (104) is likewise passed through a second polarizing beamsplitter (105) to produce a second pair of linearly-polarized output beams (106,107). Photodetectors (108,109,158,159) send an electrical signals proportional to the intensities of the beams (106,107,156,157) to a computer (99). The computer (99) calculates the phase difference between the s and p polarization components of the test beam, as well as the relative intensities of the s and p polarization components of the test beam. The invention also provides methods and means for calibrating the inventive apparatus using polarizing elements (52,53,54) and a beam block (51). The calibration procedure determines the phase retardance of the wave plate (155), the polarizing characteristics of the partially-polarizing beamsplitter (101), and the electrical characteristics of each of the photodetectors (108.109,158,159).
机译:一种用于测量测试光束的两个正交偏振分量之间的相位差以及这两个分量的强度的方法和系统。部分偏振的分束器(101)将偏振的测试光束(103)划分为第一和第二空间分离的光束(154,104)。第一光束(154)穿过波片(160),该波片(160)被定向为相对于p偏振分量延迟s偏振分量的相位。然后,第一光束(154)穿过第一偏振分束器(155),以产生具有相互正交的线性偏振的第一对在空间上分开的输出光束(156,157)。第二光束(104)同样穿过第二偏振分束器(105),以产生第二对线性偏振输出光束(106,107)。光电探测器(108,109,158,159)将与光束强度(106,107,156,157)成比例的电信号发送到计算机(99)。计算机(99)计算测试光束的s和p偏振分量之间的相位差,以及测试光束的s和p偏振分量的相对强度。本发明还提供了使用偏振元件(52、53、54)和分束器(51)来校准本发明设备的方法和装置。校准程序确定波片(155)的相位延迟,部分偏振分束器(101)的偏振特性以及每个光电探测器(108.109,158,159)的电特性。

著录项

  • 公开/公告号US5663793A

    专利类型

  • 公开/公告日1997-09-02

    原文格式PDF

  • 申请/专利权人 ZYGO CORPORATION;

    申请/专利号US19950523559

  • 发明设计人 PETER DE GROOT;

    申请日1995-09-05

  • 分类号G01B9/02;

  • 国家 US

  • 入库时间 2022-08-22 03:09:27

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