SILHOUETTE IMAGE PICK-UP METHOD AND DEVICE AND OBJECT INSPECTION METHOD AND DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an X-ray inspection device for judging whether the inside of an object is normal or not based on a silhouette image by obtaining a clear silhouette image due to X rays even for an object whose internal shape is complex. ;SOLUTION: An object S is placed on a placement stand (XY table) 3, and an X-ray source 1 for emitting X rays and an X-ray detector 2 for detecting X rays are arranged at opposite positions with the object S in between. In this case, while the X-ray source 1 and the X-ray detector 2 are positioned in opposite directions with the object S as a center, the X-ray source 1 and the X-ray detector 2 are moved in one piece within each conical region with an area near the object S as a top position, X rays are projected to the object S from the X-ray source 1, and X rays through the object S are detected by the X-ray detector 2 and the silhouette image of the object S is displayed on a monitor device 9.;COPYRIGHT: (C)1998,JPO