METHOD AND DEVICE FOR INSPECTING NON-METAL INCLUSION IN METAL MATERIAL

摘要

PROBLEM TO BE SOLVED: To determine the presence of a non-metal inclusion and its kind by selecting and scanning a visual field where it has been judged that a foreign object exists by a rough inspection and processing an image and then performing a neurofuzzy reasoning from the shape and color parameters of the foreign object. SOLUTION: The position of a sample stage 2 is adjusted and moved only for a visual field where a foreign object is recognized by a rough inspection, so that it is selected and scanned. An image that is picked up by a CCD camera 6 is processed by an image board 8 according to the instruction of a host personal computer 10. Based on the result, the host personal computer 10 judges whether a foreign object is a non-metal inclusion or not. When the object is a non-metal inclusion, its kind is discriminated and, for example, the number of the foreign objects, sizes, and area rates are obtained for each kind. The discrimination is performed by a neurofuzzy reasoning and the degree of the circle and the degree of the complication of the foreign object, the shape parameter of an aspect ratio, a color parameter of a histogram of three primary colors of red, green, and blue, the degree of dispersion of the histogram, and the degree of a pattern matching are adopted as the parameters, thus reducing an erroneous recognition and allowing an automatic inspection.