NEW STYLE HYDROGEN DETECTING ELEMENT, ITS MANUFACTURE AND GAS SENSOR

摘要

PROBLEM TO BE SOLVED: To reconcile high responsiveness and high sensitivity regardless of the presence or absence of oxygen content of a gas, and improve the detecting performance by discretely adhering a catalytic metal in dot form on a transparent base to form a thin layer. ;SOLUTION: A dotted catalytic metal thin layer 11 in which a catalytic metal is discretely adhered as a dotted pattern is formed on a transparent base 12 having transparency and optical homogeneity such as glass. As the catalytic metal forming the thin layer 11, a metal or metal, oxide called hydrogenated catalyst is used, and palladium as pure metal and a binary alloy of Pd with a IB group metal of the periodic table are more preferably used. For the formation of the thin layer 11, sputtering method of sputtering the catalytic metal as a target on the base 12, or evaporation method of adhering the catalytic metal vapor onto the base is used. The resulting hydrogen detecting element 10 is used, by which the responsiveness and sensitivity of a gas sensor can be improved, and the life of the detecting element 10 can be extended.;COPYRIGHT: (C)1998,JPO