SOFT ADJOINING LAYER MAGNETORESISTANCE SENSOR HAVING ELECTRIC SOFT ADJOINING LAYER

摘要

PROBLEM TO BE SOLVED: To evade the reduction of the signal amplitude of a sensor element through a conductive spacer layer or soft adjoining layer coming into contact with the magnetoresistance layer of the sensor element, by making each dielectric layer, the magnetoresistance layer and the soft adjoining layer inside the sensor element be planes. ;SOLUTION: In the figure, a substrate 10 having five blankets is shown. The five blanket layers are a blanket shielding layer 12, a blanket first dielectric layer 14, a blanket soft adjoining layer(SAL) 16, a blanket second dielectric spacer layer 18, a blanket magnetoresistance layer(MR) 20. Both the blanket soft adjoining layer(SAL) 16 and the blanket magnetoresistance layer(MR) 20 are formed into depths of about 50-500Å. A first photoresist.lift-off.stencil 22 is formed on the blanket magnetoresistance(MR) layer 20. The first photoresist.lift-off.stencil 22 contains a patterned release layer 22a and a patterned first photoresist layer 22b.;COPYRIGHT: (C)1998,JPO